面向精密定轴偏摆平台的PSD转角测量系统

A PSD-based angle measurement system for precision tip-tilt stages with fixed axis

针对具有固定旋转轴心的空间偏转运动精确检测问题,提出一种基于PSD的转角测量系统。搭建了一套实验装置,考虑到偏摆平台的轴心位置,并对测试系统中的光源、被测面、传感面、光路和光斑均进行坐标表达,实现了偏转角测量模型的建立。分析结果表明轴心位置对测量结果有重要影响,验证了工程应用中对精密偏摆平台轴心位置进行确定的必要性,另外分析发现偏摆平台轴心漂移问题对于该方法的影响程度小。通过搭建基于自准直仪的转角测量系统对比PSD测量系统,二者结果误差小于1.28%,验证了所提测量方法的准确性和系统的有效性。

Aiming at the problem of accurate detection of spatial tip-tilt motion with a fixed rotation axis,a tip-tilt angle measurement system based on the position sensitive detector(PSD)was proposed.A set of experimental equipment was built for this system,taking into account the axis position of the mirror,and expressing the coordinates of the light source,the measured surface,the sensing surface,the light path and the light spot in the test system,and the establishment of the tip-tilt angle measurement model was realized.The analysis results show that the position of the axis has an important influence on the measurement results,which verifies the necessity of determining the axis position of the precision tip-tilt stages in engineering applications.At the same time,the problem of axis drift has a small degree of effect on the method.By building a tip-tilt angle measurement system based on an autocollimator and comparing the PSD measurement system,the error of the two results is less than 1.28%,which verifies the accuracy of the proposed measurement method and the effectiveness of the system.