加速电压和束流强度对热敏感材料扫描电镜图像的影响

Effects of accelerating voltage and beam current on SEM images of heat sensitive materials

扫描电镜为材料形貌和成分分析中普遍使用的仪器,但部分材料由于导电性及导热性差,在实际观测过程中容易发生形貌变形。本实验以蓝绿藻、有机高分子和金属有机框架材料为样品,研究了不同加速电压和束流条件下对观测样品形貌的影响。实验结果表明对于热敏感材料,电子束总能量在一定范围内时,与束流相比,加速电压对材料的影响更大,优先采用降低加速电压更合适。

Scanning electron microscope(SEM)is widely used in the analysis of material morphology and composition.However,some materials are prone to deformation due to poor conductivity and thermal stability.In this test,blue-green algae,organic polymer materials and metal organic frameworks are used as samples to study the effects of accelerating voltage and beam current on the morphology of the samples.The experimental results show that when the total energy is within a certain range,the accelerating voltage has a greater influence on the heat sensitive materials than the beam current,and the low accelerating voltage is preferred.