基于圆脊波导的双端口微波等离子体射流装置

Design of Dual-Port Microwave Plasma Jet Based on Circular Ridge Waveguide

针对现有微波等离子体射流装置微波功率低、射流长度短和能量利用率低等问题,本文设计了一种圆脊压缩结构(可增强波导内电场强度)的等离子体射流装置,两个矩形波导分别经转换器连接圆脊波导,以双端口方式馈入微波能量,激发出大功率、高长度的等离子射流,可应用于工业处理危险固废等。使用COMSOL软件建立了圆脊模型,仿真结果表明,双端口微波能量反射较低,电场强度可达到1.54×10^(5) V/m,经实验测量,能量利用率可达到88%,于圆脊波导的石英管内产生稳定等离子体射流,高度可达400 mm。

Aiming at the problems of low microwave power,short jet length and low energy utilization of the existing microwave plasma jet devices,a plasma jet device with circular ridge compression structure(which can enhance the electric field intensity in waveguide)is designed.In which two rectangular waveguides are respectively connected with the circular ridge waveguide through the converter,and the microwave energy is fed into the circular ridge waveguide in dual-port form to excite the plasma jet with high power and long length.The device can be applied to industrial treatment of hazardous solid waste,etc.A circular ridge model is established by COMSOL software.The simulation results show that the dual-port microwave energy reflection is low,and the electric field intensity can reach 1.54×10^(5) V/m.The experimental measurement shows that the energy utilization rate can reach 88%.A stable plasma jet is generated in the quartz tube of the circular ridge waveguide,with a height of 400 mm.