薄膜体声波谐振器Mason模型参数的提取方法

Extraction Method of Mason Model Parameters of Thin Film Bulk Acoustic Resonator

为了正确分析和设计薄膜体声波谐振器(FBAR)器件,需要对谐振器Mason模型中的仿真参数(如机电耦合系数、介电常数及粘滞系数等)进行准确提取。通过简谐近似,在Mason模型中引入了厚度方向位移的横向分量,提高了参数提取的准确性。使用谐振器开路和短路图形的散射参数,提取了探针及测试焊盘的等效电路参数,对谐振器进行去嵌。根据拟合得到的模型参数,仿真了中心频率为5.43 GHz的滤波器。结果表明,采用该方法提取的模型参数仿真结果和滤波器探针测试曲线的通带形状吻合较好。

In order to correctly analyze and design thin film bulk acoustic wave resonator(FBAR),it is necessary to accurately extract the parameters(such as electromechanical coupling coefficient,dielectric parameters and viscosity coefficient etc.)of FBAR resonator in the Mason model.Through the simple harmonic approximation,the transverse component of the displacement in the thickness direction is introduced into the Mason model to improve the accuracy of the model.Using the scattering parameters of open and short graphics,the equivalent circuit parameters of probe and test pad are extracted to de-embed the resonator.The filter with center frequency of 5.43 GHz is simulated with the fitted model parameters.The results show that the simulation results of the mode parameters extracted by this method are in good agreement with the passband shape of the probe test curve of the filter.