摘要
原子力显微镜是表征材料微观力学性质的重要手段,本文基于原子力显微镜的压痕法和双模纳米力学法,探究薄膜/基底材料与多层二维材料杨氏模量测定过程中的影响因素,分析了基底硬度、二维材料厚度以及环境湿度对两种纳米力学表征结果的影响,为研究适用于纳米材料微观力学的测定提供参考。
Atomic force microscope is an important means to characterize the micromechanical properties of materials.Based on the indentation method of the atomic force microscope and the bimodal nanomechanical method,this research explored the influencing factors in the determination of the modulus of film/substrate materials and multilayer two-dimensional materials.In this paper,we studied the influence of substrate hardness,two-dimensional material thickness and environmental humidity when characterizing nanomechanics.And the results provided a reference for the nanomechanical test of composite materials.
作者
单齐冀
韩瑶
张莹
李慧琴
SHAN Qi-ji;HAN Yao;ZHANG Ying;LI Hui-qin(Instrumental Analysis Center,Shanghai Jiao Tong University,Shanghai 200240,China)
出处
《电子显微学报》
CAS
CSCD
北大核心
2022年第2期154-160,共7页
Journal of Chinese Electron Microscopy Society
关键词
压痕模式
双模纳米力学模式
基底
厚度
湿度
indentation mode
bimodal nanomechanical mode
substrate
thickness
humidity