摘要
为了研究不同弯曲曲率对V型梁模块具有不同的影响,提出了以液晶高分子聚合物(LCP)柔性材料为衬底的V型梁弯曲的力学模型,并通过软件仿真和实验验证完成了柔性V型梁器件受弯曲曲率的影响。从对比结果可得,当柔性衬底的曲率从0逐渐增大到34.1 m^(-1)时,V型梁的驱动电流也随之增大,实测值与仿真值的最大误差低于3.70%,很好地揭示了柔性衬底弯曲曲率对V型梁模块的驱动性能产生的影响。研究的V型梁模块在自动影像测量系统上的线性吻合度基本可达100%,可满足自动影像测量的稳定可靠、精度高、抗干扰能力强等要求。
In order to study the different effects of different bending curvature on V-beam module,a mechanical model of V-beam bending based on LCP flexible material is proposed,and the influence of bending curvature on flexible V-beam device is verified by software simulation and experiment.It can be seen from the comparison results that when the curvature of the flexible substrate gradually increases from 0 to 34.1 m^(-1),the driving current of the V-beam also increases,and the maximum error between the measured value and the simulation value is less than 3.70 %,which well reveals the influence of the bending curvature of the flexible substrate on the driving performance of the V-beam module.The linear coincidence of the V-beam module in the automatic image measurement system can basically reach 100 %.It can meet the requirements of stability,reliability,high precision and strong anti-interference ability of automatic image measurement.
作者
于海燕
李宇
张德贤
YU Haiyan;LI Yu;ZHANG Dexian(College of Information Engineering,Zhengzhou University of Science&Technology,Zhengzhou 450064,China;College of Electrical Engineering,Zhengzhou University of Science&Technology,Zhengzhou 450064,China;College of Information Science and Engineering,Henan University of Technology,Zhengzhou 450001,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第5期23-26,30,共5页
Transducer and Microsystem Technologies
基金
国家公共安全风险防控与应急技术装备重点专项项目(2018YFC0824402)
河南省高等学校重点科研项目(21B880041)。
关键词
微机电系统
弯曲曲率
柔性衬底
V型梁模块
力学特性
micro-electro-mechanical system(MEMS)
bending curvature
flexible substrate
V-type beam module
mechanical properties
