球磨参数对铜铟镓硒(CIGS)靶材粉料的影响

Influence of ball milling parameters on CIGS target powder

采用不同球磨参数对CIGS靶材的Cu_(2)Se、In_(2)Se_(3)和Ga_(2)Se_(3)原始粉料进行球磨混合,通过标准筛筛分法和FESEM研究分析球磨时间、球料液配比对球磨后的CIGS靶材粉料的粒径和显微形貌的影响。结果表明:随着球磨时间的增加,球磨粉料的300目筛过筛率先增加后减小;而球料液配比的变化对球磨粉料的筛分过筛率的影响没有规律性。球磨1 h和2 h时,球磨粉料团聚较少,粉料颗粒基本呈片状结构;球磨2 h时,球磨粉料粒径大小比较均匀;球磨4 h时,球磨粉料团聚现象明显。

The Cu_(2)Se、In_(2)Se_(3)和Ga_(2)Se_(3)raw powders of CIGS target were mixed by ball milling with different ball milling parameters.The effects of ball milling time and ball-powder-liquid ratio on particle size and microstructure of CIGS milled powders were studied by screening method of standard sieve and FESEM.The results show that with the increase of ball milling time,the leaking percentage of the sieve bottom of milled powders increases first and then decreases.However,the change of ball-powder-liquid ratio has no regular effect on the leaking percentage of the sieve bottom of milled powders.When the ball milling times are 1 h and 2 h,the agglomeration of milled powders is less,and the powders particles are basically flake structure.At 2 h of ball milling time,the particle size of milled powders is uniform.When the ball milling time is 4 h,the agglomeration phenomenon of milled powders is obvious.