高纯液氯的纯化技术

Method for Producing High Purity Liquid Chlorine

随着微电子、新型半导体材料和大规模集成电路技术的快速发展,对高纯液氯的质量要求不断提高,要求其具有更低的杂质含量,因此高纯液氯的纯化技术受到广泛关注。本文介绍了高纯液氯的基本性质和应用领域,概述了国内外高纯液氯的研制、纯化以及去除其中特定杂质的方法。展望了高纯液氯纯化技术的发展,高纯氯气作为重要的电子气体将发挥重要的作用,对该产品进行产业化生产十分必要。

With the rapid development of microelectronics,new semiconductor materials and large scale integrated circuit technology,it is required to have lower impurity content and higher quality requirements for high-purity liquid chlorine.Therefore,the purification technology of high purity liquid chlorine has attracted wide attention.The basic properties of high purity liquid chlorine and the application fields of high purity liquid chlorine were introduced.The process for making high-purity liquid chlorine was summarized,and the methods of removing some impurities specially appointed were disclosed.The development of high purity liquid chlorine purification technology was prospected.High purity liquid chlorine used as important electronic gases will play an important role.So it is necessary to conduct commercial scale process of high purity liquid chlorine.