激光显微共聚焦拉曼光谱仪变温系统的设计与研制

Design and development of temperature-control system for laser confocal micro-Raman Spectrometers

针对常规激光显微共聚焦拉曼光谱仪无法满足物质变温,特别是低温测试需求的问题,设计了适用于拉曼光谱仪的高精度变温系统。该系统采用GM制冷机作为制冷源,利用高纯无氧铜作为导冷介质,通过将GM制冷机的冷量传导至样品台,并利用控温仪进行温度控制,可以实现待测样品10 K-402 K范围的温度变化控制,控温精度高于0.008 K。相比于常规的低温测试设备,该系统无需采用液氮、液氦进行制冷,大幅降低了设备的使用及维护费用。同时,使用激光显微共聚焦拉曼光谱仪搭载该系统,成功获得了Si、V_(2)O_(5)等材料的变温拉曼光谱,验证了激光显微共聚焦拉曼光谱仪变温系统设计的可靠性。

Aiming at the problem that conventional laser confocal micro-Raman spectrometers cannot meet the requirements of material temperature changes, especially low temperature testing, a high-precision temperature change system suitable for Raman spectrometers was designed. The system used a GM refrigerator as the cooling source, and used high-purity oxygen-free copper as the cooling medium to transfer the cold energy of the GM refrigerator to the sample stage. The temperature was controlled by a temperature controller, and the sample to be tested can be 10 K-402 K. The temperature control accuracy was higher than 0.008 K. Compared with conventional cryogenic test equipment, the system does not need to use liquid helium for refrigeration, which greatly reduces equipment use and maintenance costs. At the same time, by combining with the laser confocal Raman spectrometer, the temperature-variable Raman spectra of Si, V_(2)O_(5) and other materials were successfully obtained, which verified the feasibility and rationality of the temperature-variable system design of the laser confocal Raman spectrometer.