不同驱动方式下超纯水隔膜阀阀口流动特性研究

Flow Characteristics of Ultrapure Water Diaphragm Valve under Different Driving Modes

隔膜阀由于结构简单、密封性好、耐腐蚀和耐磨损等特点被广泛应用于流体控制系统中。超纯水隔膜阀隔膜一般由PTFE或PFA材料制成,在不同驱动方式的作用下隔膜产生不同程度的变形,从而导致阀口流动特性呈现明显差异。采用流固耦合的计算方法,研究了在手动和电磁两种驱动方式下,隔膜提升相同高度时的隔膜形变和阀口流动特性。结果表明,两种驱动方式的流量-压力系数均为线性关系,且电磁驱动隔膜阀流量-压力系数大于手动驱动;由于两种驱动方式作用下隔膜受力状态不同,导致电磁驱动隔膜阀的流量增益近似为恒定值,而手动驱动隔膜阀的隔膜发生了明显的偏置现象,其流量压力特性表现出明显的非线性特征。

Diaphragm valves are widely used in fluid control systems due to their simple structure,good sealing,corrosion resistance and wear resistance.Ultrapure water diaphragm valve diaphragms are generally made of PTFE or PFA materials.Under the action of different driving methods,the diaphragm produces different degrees of deformation,resulting in obvious differences in the flow characteristics of the valve ports.In this paper,the fluid-structure coupling calculation method is used to study the deformation of the diaphragm and the flow characteristics of the valve port when the diaphragm is lifted to the same height under the two driving modes of manual and electromagnetic.The results show that the flow-pressure coefficients of the two driving modes are linear,and the flow-pressure coefficient of the solenoid-driven diaphragm valve is greater than that of manual driving;due to the different force states of the diaphragm under the action of the two driving methods,the flow rate of the solenoid-driven diaphragm valve The gain is approximately a constant value,and the diaphragm of the manually driven diaphragm valve has an obvious offset phenomenon,and its flow pressure characteristic shows obvious non-linear characteristics.