石墨烯谐振式压力传感器的研究进展

Research Progress of Graphene Resonant Pressure Sensor

石墨烯是一种只有单原子层厚度的新材料,具有良好的导电性、导热性和力学性能,被广泛应用于诸多领域,由于石墨烯对气体的不透过性,被用于谐振式压力传感器的敏感元件。文中对石墨烯的特性进行了介绍,描述了目前石墨烯常用的制备和转移方式。阐述了谐振器常用的激励和检测方式,重点从理论仿真研究和实验研究方面详细介绍了国内外学者对于石墨烯谐振式压力传感器的研究成果。不同研究小组制做的石墨烯谐振式压力传感器的谐振频率和品质因数都有较大的差距,与理论和仿真的研究结果也相差很多,这往往受石墨烯制备和转移过程中产生的缺陷影响。目前对于石墨烯谐振式传感器的实验研究还比较匮乏,在性能的提升和加工工艺方面仍然面临着诸多的困难和挑战。

Graphene is a new material with the thickness of monatomic layer,which has good electrical conductivity,thermal conductivity and mechanical properties.It is widely used in many fields,and its impermeability to gas also makes it used as the sensing element of resonant pressure sensor.The characteristics of graphene were introduced,and the common preparation and transfer methods of graphene were described.Common excitation and detection methods of the resonator were described,and the research results of graphene resonant pressure sensor by domestic and foreign scholars were introduced in detail from two aspects of theoretical simulation and experimental research.The resonance frequency and quality factor of the graphene resonant pressure sensors made by different research groups were quite different from the theoretical and simulation results,which was often affected by the defects in the process of graphene preparation and transfer.At present,the experimental research of graphene resonant sensor is still relatively scarce,and there are still many difficulties and challenges in improving the performance and processing technology.