高频脉冲电子束偏压电源设计

Design of Bias Power Supply for High-frequency Pulsed Electron Beam

为了实现具有陡峭上升沿和下降沿的高频脉冲偏压,改善高频脉冲电子束束流品质,提出了基值偏压直流电源、脉冲偏压直流电源和高压斩波主电路串联的主电路结构。高压斩波主电路通过MOSFET功率开关管导通和关断将脉冲偏压直流电源变换为高频脉冲偏压输出,使脉冲偏压具有快速变化的上升沿和下降沿;基于调制解调工作原理,设计了高压隔离通讯电源,实现了脉冲频率、占空比等高频脉冲偏压参数及命令从低压电路向高压斩波电路的可靠传输并生成PWM波形;设计了专门的高压隔离供电电源,实现了高压端高压斩波电路的可靠供电与驱动。基于上述技术,研制出高频脉冲电子束偏压电源,获得了具有陡峭上升沿和下降沿的高频脉冲偏压输出,20 kHz时脉冲偏压上升沿≤1μs。

In order to realize high-frequency pulse bias with steep rising and falling edges and improve the quality of highfrequency pulse electron beam,a main circuit structure of series connection of base value bias DC power supply,pulse bias DC power supply and high-voltage chopper main circuit is proposed.The high-voltage chopper main circuit converts the pulse bias DC power supply into high-frequency pulse bias output through MOSFET power switch on and off,which make the pulse bias has rapidly changing rising and falling edges;Based on the working principle of modulation and demodula‐tion,a high-voltage isolated communication power supply is designed to realize the reliable transmission of high frequency pulse bias parameters such as pulse frequency and duty cycle and commands from low voltage circuit to high voltage chop‐per circuit and generate the PWM waveform;A special high-voltage isolated power supply is designed to realize the reliable power supply and drive of the high-voltage chopper circuit at the high-voltage end.Based on the above technology,a highfrequency pulse electron beam bias power supply is developed,and a high-frequency pulse bias output with steep rising and falling edges is obtained.The rising edge of pulse bias is not more than 1μs at 20 kHz.