摘要
半球谐振陀螺是一种高精度、高可靠性、小型化的角速度传感器,被誉为“具有颠覆性的技术”,“可以改变惯导行业版图”。综述了半球谐振陀螺国内外研究现状,分析了国内外主要差距;总结了半球谐振陀螺的关键技术,强调了精密加工、化抛、调平、镀膜、装配、电路控制和误差补偿等关键技术;分析了半球谐振陀螺的发展趋势,包括技术发展趋势和市场发展趋势。
Hemispherical resonator gyroscope(HRG)is a kind of angle rate sensor with high precision,high reliability,and small size weight and power(SWaP). HRG innovative approach is a real game changer in high end navigation,which may change the territory of inertial navigation industry. In this paper,the current advances of HRG are reviewed,the research gap between home and abroad is analyzed. The key technology of HRG is summarized,and the technologies of the precision processing,chemical etching,frequency balancing,film deposition,assembling,electronics and control,error compensation,etc. are emphasized. In the end,the developing trends of HRG technology and market are discussed.
作者
曲天良
QU Tian-liang(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)
出处
《光学与光电技术》
2022年第2期1-16,共16页
Optics & Optoelectronic Technology
关键词
惯性导航
半球谐振陀螺
全角模式
力平衡模式
谐振子
inertial navigation
hemispherical resonator gyroscope
whole angle mode
force-to-rebalance mode
resonator
