摘要
采用旋转喷涂法低温沉积制备NiZn铁氧体薄膜,研究了Zn含量对NiZn铁氧体薄膜相结构、显微形貌和磁性能的影响。结果表明,随Zn含量增加,薄膜平均晶粒尺寸增大,其结晶度和饱和磁化强度M_(s)先增大后减小,矫顽力H_(c)减小至0.57 kA/m,薄膜起始磁导率μ′增大,截止频率f_(r)降低。EDS测试结果可知旋转喷涂法制备NiZn铁氧体薄膜中Zn含量越高时成分中Ni的缺失越严重。当主配方为Ni_(0.09)Zn_(0.68)Fe^(2.23)O_(4)时,频率在100 MHz的起始磁导率μ′可达最大值96。
The NiZn ferrite film was prepared by spin-spraying deposition,and the influence of Zn content on the phase structure,micro morphology and magnetic properties of the NiZn ferrite film was studied.The results show that the increase of Zn content can increase the average grain size of the film,the crystallinity and saturation magnetization M_(s) first increase and then decrease,the coercive force H_(c) decreases to 0.57 kA/m,the initial permeabilityμ′of the film increases,and the cut-off frequency f_(r) decreases.The EDS test results show that the higher the Zn content in the NiZn ferrite film prepared by the spin-spraying deposition,the more serious the loss of Ni in the composition.When the main formula is Ni_(0.09)Zn_(0.68)Fe^(2.23)O_(4),the initial permeabilityμ′at 100MHz can reach the maximum value of 96.
作者
刘培元
张凯
冉茂君
青豪
余忠
孙科
兰中文
LIU Pei-yuan;ZHANG Kai;RAN Mao-jun;QING Hao;YU Zhong;SUN Ke;LAN Zhong-wen(Ruyuan Dongyangguang Magnetics Materials Co,Ltd,Shaoguan 512000,China;School of Materials and Energy,University of Electronic Science and technology of China,Chengdu 610054,China)
出处
《磁性材料及器件》
CAS
CSCD
2022年第2期22-26,共5页
Journal of Magnetic Materials and Devices