高加速精密运动平台前馈控制研究

Research on Feedforward Control of High Acceleration Precision Motion Platform

随着微电子制造装备向着高质量和高效率的方向发展,从而对精密运动平台提出了高速高加速和高精度的性能指标要求。通常为了实现高速高精度,会采用前馈控制,但一般只是采用速度前馈和加速度前馈两个参数进行调试,但运用在高加速精密运动平台上,还是不能更好地消除动态跟随误差和稳态整定误差。针对常用的前馈控制算法,通过对控制器输出指令进行五阶S曲线速度规划,引入加加速度指令,从而提出了优化加加速度前馈参数的控制算法,来有效地解决高加速精密运动平台的快速定位动态响应和稳态整定性能问题。

With the development of microelectronics manufacturing equipment in the direction of high quality and high efficiency,high-speed,high-acceleration and high-precision performance indicators are required for precision motion platforms.Usually we use feedforward control in order to achieve high speed and high precision,but generally only two parameters of speed feedforward and acceleration feedforward are used for debugging.However,when it is used on a high-acceleration precision motion platform,the dynamic following error and steady-state setting error cannot be better eliminated.Aiming at the commonly used feedforward control algorithm,this paper proposes a control algorithm to optimize the jerk feedforward parameters by carrying out the fifth-order S-curve velocity planning for the output command of the controller and introducing the jerk command.Effectively solve the problem of dynamic response and steady-state setting performance of fast positioning of high-acceleration precision motion platform.