摘要
Electrostatic discharge(ESD)event usually destroys the electrical properties of dielectric films,resulting in product failure.In this work,the breakdown characteristic of machine mode(MM)ESD on three different nano size films of head gimble assemble are obtained experimentally.The breakdown voltage and thickness parameters show a positive proportional relationship,but they are generally very low and have large discrete characteristics(~30%).The maximum and minimum breakdown voltages of the tested samples are 1.08 V and 0.46 V,which are far lower than the requirement of the current standard(25 V).In addition,the judgment criterion of product damage is given,and the relationship between discharge voltage polarity,initial resistance and breakdown voltage is studied.Finally,the theoretical analysis of the breakdown characteristic law has been given.
作者
王荣刚
孙玉荣
贺柳良
欧阳吉庭
Ronggang WANG;Yurong SUN;Liuliang HE;Jiting OUYANG(Suzhou TA&A Ultra Clean Technology Co.Ltd.,Suzhou 215121,People's Republic of China;Beijing Institute of Technology,Beijing 100081,People's Republic of China;College of Science,Beijing University of Civil Engineering and Architecture,Beijing 102616,People's Republic of China)