激光旋转切割石英管设备研制及其工艺研究

Development and process research of laser rotary cutting quartz tube equipment

为了实现将密封石英管内器件取出的目的,设计研制了一套激光旋转切割设备。由于石英管内密封晶圆类易碎器件,为了不产生振动将石英管内器件取出,利用激光非接触切割原理,以石英管为中心设计光学旋转切割系统,实现360°旋转切割石英管,并分析试验数据,通过优化的试验数据,最终实现高效、无损伤的石英管切割技术。

In order to realize the removal of the components in the sealed quartz tube,a set of laser rotary cutting equipment is designed and developed.Vibration cannot occur because the quartz tube is sealed with the wafer device.The device inside the quartz tube is removed,and the principle of laser non-contact cutting is used to design an optical rotary cutting system centered on the quartz tube to realize 360°rotational cutting of the quartz tube.Then the test data is analyzed.Through the optimized test data,the efficient and damage-free quartz tube cutting technology is finally realized.