摘要
In this work,we design and fabricate a deep ultraviolet(DUV)light-emitting array consisting of 10×10 micro-LEDs(μ-LEDs)with each device having 20μm in diameter.Strikingly,the array demonstrates a significant enhancement of total light output power by nearly 52%at the injection current of 100 mA,in comparison to a conventional large LED chip whose emitting area is the same as the array.A much higher(~22%)peak external quantum efficiency,as well as a smaller efficiency droop forμ-LED array,was also achieved.The numerical calculation reveals that the performance boost can be attributed to the higher light extraction efficiency at the edge of eachμ-LED.Additionally,the far-field pattern measurement shows that theμ-LED array possesses a better forward directionality of emission.These findings shed light on the enhancement of the DUV LEDs performance and provide new insights in controlling the light behavior of theμ-LEDs.
基金
funded by the National Natural Science Foundation of China (Grant Nos. 52161145404, 61905236, 51961145110)
the Fundamental Research Funds for the Central Universities (Grant No. WK2100230020)
USTC Research Funds of the Double First-Class Initiative (Grant No. YD3480002002)
