曲臂菱形放大机构的压电位移驱动器

Piezoelectric displacement driver of crank arm rhombus amplification mechanism

在菱形位移放大机构基础上,设计了一种基于曲臂菱形位移放大机构的压电微位移驱动器,该驱动器在保证位移放大比的条件下,获得了较高的固有频率,并且为微位移闭环控制提供了一种反馈方法。首先,根据正交三角放大原理计算了曲臂菱形位移放大比,仿真优化了主要模型参数。然后,对位移放大机构的固有频率、位移放大比以及单臂应变进行有限元仿真分析。结果表明,曲臂菱形位移放大机构相比于传统菱形位移放大机构一阶固有频率提高了17.68%;单臂应变与输出位移呈线性关系,即利用应变传感检测动态位移,可以用于微位移反馈控制。最后,制作了压电微位移驱动器样机及基于应变检测的输出位移检测装置,完成了静态位移输出、简谐运动与模拟负载特性实验。实验结果表明,驱动电压为100 V时,静态最大输出位移为131.04μm,位移放大比为3.49,驱动电压频率为30 Hz时,最大输出位移为128.24μm,非线性误差为0.964%。

Based on the rhombus displacement amplification mechanism,a piezoelectric micro-displacement driver based on the crank arm rhombus displacement amplification mechanism was designed.The driver obtained a higher natural frequency under the condition of ensuring the displacement amplification ratio,and provided a feedback method for micro-displacement closed-loop control.First of all,the magnification ratio of the rhomboid displacement of the crank arm was calculated according to the principle of orthogonal triangle magnification,and the main model parameters were optimized by simulation.Then,performed finite element simulation analysis on the natural frequency,displacement amplification ratio and single-arm strain of the displacement amplification mechanism.The results show that the first-order natural frequency of the crank arm rhombus displacement amplification mechanism is increased by 17.68%compared with the traditional rhombus displacement amplification mechanism;the strain of the single arm has a linear relationship with the output displacement,that is,the dynamic displacement is detected by strain sensing,which can be used for micro displacement feedback control.Finally,the prototype of the piezoelectric displacement driver and the output displacement detection device based on strain detection were produced,and the static displacement output,simple harmonic motion and simulated load characteristic experiments were completed.The experimental results show that when the driving voltage is 100V,the static maximum output displacement is 131.04μm,the displacement amplification ratio is 3.49,and the driving voltage frequency is 30Hz,the maximum output displacement is 128.24μm,and the nonlinear error is 0.964%.