摘要
目前,干涉测量已广泛用于检测精密工艺样品表面的平整度。传统方法一般利用尺子和铅笔对干涉图进行判读来评定试样表面的粗糙程度,不仅无法保证精度,还会消耗大量的人力、物力。为完整提取迈克尔逊干涉圆环图像信息,本文基于数学形态学的传统视觉处理技术,提出“预处理,二值化,提取明纹中心圆环”为基本框架的处理系统。
At present, interferometry has been widely used to detect the surface flatness of precision process samples. Traditional methods generally use ruler and pencil to interpret the interferogram to evaluate the roughness of the sample surface, which can not only ensure the accuracy, but also consume a lot of manpower and material resources. Therefore, based on the traditional visual processing technology of mathematical morphology, this paper proposes a processing system with "preprocessing, binarization, and extracting the center ring of bright pattern" as the basic framework. The complete extraction of Michelson interference ring image information lays the foundation for macro measurement.
作者
孙克璇
王先勇
邹子涵
孙悦
李鑫
芮云军
SUN Kexuan;WANG Xianyong;ZOU Zihan;SUN Yue;LI Xin;RUI Yunjun(School of Computer Science and Technology,Nanjing Tech University,Nanjing Jiangsu 211816,China;School of Mathematical Sciences,Nanjing Tech University,Nanjing Jiangsu 211816,China)
出处
《信息与电脑》
2022年第6期4-7,共4页
Information & Computer
基金
江苏省大学生创新创业训练计划项目(项目编号:202110291149Y)。