微小型光开关侧壁反射镜光路传输效率优化方法

Optimization Method for Optical Transmission Efficiency of Sidewall Reflector of Micro-optical Switch

提出利用电感耦合等离子体和聚焦离子束刻蚀工艺相结合的加工方法,以提高微小型光开关侧壁反射镜的表面粗糙度,进而提升光路传输效率。利用扫描电子显微镜和原子力显微镜对微小型光开关侧壁反射镜表面粗糙度进行表征,并开展了光路传输效率测试实验。结果表明,经聚焦离子束刻蚀后,微小型光开关侧壁反射镜表面粗糙度由190nm减小到56nm,光路传输效率由10.2%提高到39.1%。

A novel fabrication technique by utilizing the combination of inductively coupled plasma(ICP)and focused ion beam(FIB)etching is presented to improve the surface roughness and optical transmission efficiency of the sidewall reflector.The surface roughness is characterized with both scanning electron microscope(SEM)and atomic force microscope(AFM).Results show that the sidewall reflector roughness decreases from 190 nm to 56 nm after the FIB etching.The optical transmission efficiency of the micro-optical switch has been improved from 10.2% to 39.1%.