摘要
介绍了光伏太阳能电池片产生的PECVD工序中石墨舟精准定位的重要性,设计了一种新型的石墨舟定位机构,阐述了其工作原理,利用Solidworks的Simulation模块对石墨舟定位机构分别进行建模和变形分析,提出了装配方法,保证了定位基准面的安装精度。
The importance of precise positioning of graphite boat in the PECVD process produced by photovoltaic solar cells is introduced.A new type of graphite boat positioning mechanism is designed,and its working principle is expounded.The graphite boat positioning mechanism is modeling and deformation analyzed respectively with the use of Simulation module of Solidworks.And an assembly method is proposed to ensure the installation accuracy of the positioning reference plane.
作者
张奇巍
任云星
剌颖乾
Zhang Qiwei;Ren Yunxing;La Yingqian(The 2nd Research Institute of CETC, Taiyuan Shanxi 030024, China)
出处
《山西电子技术》
2022年第3期41-42,46,共3页
Shanxi Electronic Technology
关键词
石墨舟
定位机构
变形分析
安装精度
graphite boat
precise positioning
deformation analysis
installation accuracy
