基于电容-电阻转换原理的柔性压力传感器

Flexible Pressure Sensor Based on Capacitance-Resistance Conversion Principle

目前,基于碳基纳米材料的柔性压力传感器凭借着其便携性、柔韧性、生物相容性和低成本等特点,在智能医疗、人机交互和智能机器人等领域有着广泛的应用前景,但如何使其在具有较大量程范围的同时保持较高灵敏度,仍是一个严峻的挑战。提出一种基于氧化石墨烯/碳纳米管(Graphene Oxide/Carbon Nanotube, GO/CNT)复合敏感层的柔性压力传感器,同时以热塑性聚氨酯弹性体(Thermoplastic Polyurethanes, TPU)多孔海绵作为传感器骨架。该GO/CNT@TPU柔性压力传感器的量程范围为0~60 kPa,基于电容-电阻转换原理,当受到较小压力(0~5 kPa)时,传感器以电阻感知为主,灵敏度为0.05777 kPa;当受到较大压力(5~60 kPa)时,传感器以电容感知为主,灵敏度为0.33213 kPa;。从而有效地实现了传感器的在宽量程内的高灵敏度检测。

At present, with the characteristics of portability, flexibility, biocompatibility and low cost, the flexible pressure sensor based on carbon nano materials has a wide application prospect in the fields of intelligent medicine, human-computer interaction and intelligent robot.However, how to make it maintain high sensitivity with a large range is still a severe challenge.A flexible pressure sensor based on graphene oxide/carbon nanotube(GO/CNT) composite sensitive layer is proposed, and thermoplastic polyurethanes(TPU) porous sponge is used as the sensor skeleton.Based on the capacitance-resistance conversion principle, the sensitivity of the GO/CNT@TPU pressure sensor is 0.05777 kPa;in the small pressure(0~5 kPa) with the resistance sensing, and the sensitivity is 0.33213 kPa;in the large pressure(5~60 kPa) with the capacitive sensing, which effectively realizes the high sensitivity detection of the sensor in a wide range.