LCOS芯片相位调制特性的研究

Study on phase modulation characteristics of LCOS chip

相位调制曲线是LCOS(硅基液晶)芯片研发测试环节中的一个非常重要的参数,它对芯片隔离度、衍射效率、相位抖动等相关测试有非常关键的作用,测试LCOS芯片的相位调制特性至关重要.本文中提出一种用1/4波片法测量LCOS芯片相位调制特性的全新方法每加载一次灰度图就调节检偏器的角度,使经LCOS芯片调制后的光透过检偏器后光强达到最小,记录每次检偏器调节的角度可以计算出LCOS芯片的相位调制深度,并得到相位调制曲线,实验测试相位深度为2.9533π,相位调制曲线的线性度为0.9998.该实验开创一种新的相位调制特性测量方法,对更好地使用液晶空间光调制器有重要意义.

Phase modulation curve is a very important parameter in the development and testing of LCOS chip.It plays a key role in the chip isolation degree,diffraction efficiency,phase jitter and other related tests,so it is very important to test the phase modulation characteristics of LCOS chip.In this paper,a new method for measuring the phase modulation characteristics of LCOS chip by the quarter-wave plate method was proposed,when the angle of the polarizer was adjusted every time the gray scale was loaded to minimize the light intensity through the polarizer modulated by the LCOS chip.The phase modulation depth of the LCOS chip could be calculated by recording the angle adjusted by the polarizer each time.The measured phase depth was 2.9533π,and the linearity of the phase modulation curve was 0.9998.This experiment creates a new measurement method of phase modulation characteristics,which is of great significance to better use of liquid crystal spatial light modulator.