基于黑磷的纳光机电磁矢量传感器设计

Nano-Opto-Electromechanical Magnetic Vector Sensor Design Based on Black Phosphorus

基于二维材料的纳机电谐振器具有体积小、频率高、品质因数高等优势,在传感领域具有很大的应用潜力。其中,黑磷由于其波纹状的平面结构和各向异性的机械特性,为平面内矢量传感提供了可能。利用黑磷设计了一种光学激发光学读出的新型纳光机电磁矢量传感器。利用有限元分析法,探究了黑磷层数和长宽比对矢量性的影响,确定了黑磷谐振器的尺寸为0.6μm×0.134μm×0.5 nm;分别探索了高杨氏模量和低杨氏模量方向对磁场响应的各向异性。通过谐振模式的空间分布,解释了角度和长宽比对器件灵敏度和矢量性的影响机理。结果表明,将磁场旋转90°,灵敏度可从-4.048 MHz/mT变化为5.796 MHz/mT。与精度相近的洛伦兹力的微机电磁传感器相比,所设计传感器的频率可提高6个数量级,尺寸可缩小6个数量级。该设计为新型纳光机电矢量传感器的制备提供了一种方法。

Nanomechanical resonant sensors based on two-dimensional materials have great potential in sensing with the advantages of small size,high frequency,and high-quality factor.Among them,black phosphorus provides a unique opportunity for in-plane vector sensing due to its corrugated planar structure and anisotropic mechanical characteristics.In this paper,a new type of a nano-opto-electromechanical magnetic vector sensor based on optically excited optical readout is designed using black phosphorus.Using the finite element analysis method,the influences of the number of layers and the length-width ratio of black phosphorus on the vector property are studied,and the system structure is optimized with the size of 0.6μm×0.134μm×0.5 nm.The anisotropy of the response to the magnetic field in the directions of high Young's modulus and low Young's modulus is explored,respectively.By using the spatial distribution of resonant modes,the influences of the angle and length-width ratio on the sensitivity and vector property of the device are explained.It can be found that in the Armchair direction,when the magnetic field rotates 90°,the sensitivity changes from-4.048 MHz/mT to 5.796 MHz/mT.Compared with Lorent force-based micro-electromechanical sensors,the resonant frequency of the designed sensor can be improved by 6 orders of magnitude,and its size can be reduced by 6 orders of magnitude.This design provides a new method for the preparation of a nano-opto-electromechanical vector sensor.