摘要
硫系玻璃集成光学微腔(硫系微腔)具有高线性折射率和高非线性系数、超宽透光窗口、较低的热光系数,并且可通过常规半导体微纳加工技术实现精确的色散调控,在非线性集成光子学领域备受关注。近年来,来自中山大学的研究者们开发了新型Ge_(25)Sb_(10)S_(65)硫系材料平台并实现了一系列具有高品质的硫系集成光子器件。主要综述了基于硫系微腔实现集成孤子光频梳产生和调控方面的工作。通过不断优化集成光子器件的加工工艺,实现了具有高品质因子(Q>10^(6))的集成微环谐振腔,进一步通过精确的色散调控分别在该硫系集成微腔内实现了低泵浦功率的锁模光孤子频梳和宽带可调谐的拉曼-克尔光频梳。
Chalcogenide glass integrated microresonators(chalcogenide microresonators)have attracted great attention in nonlinear integrated photonics in recent years because of their high linear refraction index,high nonlinearity coefficient,ultra-wide transmittance window,low thermo-optic coefficient,and precisely regulated dispersion with conventional semiconductor micro-nanofabrication technology.Recently,the researchers from the Sun Yat-sun University developed a novel chalcogenide glass(Ge_(25)Sb_(10)S_(65))material platform and realized a series of high-quality chalcogenide integrated photonic devices.The progress of integrated soliton microcombs generation and regulation based on chalcogenide microresonators was reviewed.The integrated chalcogenide microresonators with high-quality factors(Q>10^(6))were achieved by a modified nanofabrication process.Furthermore,mode-locked soliton microcombs with a low pump power and a widely tunable Kerr-Raman comb were achieved by precisely controlling the dispersion,respectively.
作者
夏迪
赵佳鑫
吴家越
王自富
张斌
李朝晖
Xia Di;Zhao Jiaxin;Wu Jiayue;Wang Zifu;Zhang Bin;Li Zhaohui(Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems,School of Electrical and Information Technology,Sun Yat-sen University,Guangzhou 510275,China;Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University,Guangzhou 510275,China;Southern Marine Science and Engineering Guangdong Laboratory(Zhuhai),Zhuhai 519000,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2022年第5期43-51,共9页
Infrared and Laser Engineering
基金
国家重点研发计划-变革性技术关键科学问题项目(2019YFA0706300)
国家重点研发计划(2018YFB1801003)
国家自然科学基金(U2001601,61975242)。
关键词
硫系玻璃
集成光学微腔
非线性集成光子学
孤子微腔光梳
chalcogenide glasses
integrated optical microresonators
nonlinear integrated photonics
soliton microcombs