多弧离子镀TiAlCrN薄膜的制备及其抗氧化性能研究

Research on Preparation and Oxidation Resistance of TiAlCrN Film by Multi-Arc Ion Plating

为提高模具钢表面性能,延长模具钢使用寿命,采用多弧离子镀技术在H13模具钢表面制备TiAlCrN薄膜。采用扫描电镜(SEM)、X射线衍射(XRD)等方法研究氮氩流量比对TiAlCrN薄膜的表面形貌、物相组织、硬度、结合力、高温抗氧化性能的影响。研究表明:随着氮氩比的增加,TiAlCrN薄膜表面大颗粒数量先增加后减少,硬度、结合力、高温抗氧化性能先增强后减弱;在氮氩比为8∶2时,TiAlCrN薄膜具有最优性能,氧化前的薄膜硬度达到最大值2700 HV_(0.5N),膜基结合力达到最大值26 N,高温抗氧化性能达到最优。

In order to improve the surface properties and prolong the service life of die steel,TiAlCrN film was prepared on the surface of H13 die steel by multi-arc ion plating technology.The effects of nitrogen-argon flow ratio on the surface morphology,phase structure,hardness,adhesion,and high temperature oxidation resistance of TiAlCrN film were investigated through scanning electron microscope(SEM)and X-ray diffraction(XRD).Results showed that with the increase of nitrogen argon ratio,the number of large particles on the surface of TiAlCrN film increased first and then decreased,and the hardness,adhesion and high temperature oxidation resistance also increased first and then decreased.When the nitrogen-argon ratio was 8∶2,the as-prepared TiAlCrN film had the optimal properties,such as the maximum hardness of 2700 HV_(0.5N),the maximum film-substrate adhesion of 26 N,and the optimal high-temperature oxidation resistance.