高纯八氟环丁烷的制备及其在芯片制造中的应用

Preparation of High-purity Octafluorocyclobutane and Its Application in Integrated Circuit Manufacturing

高纯八氟环丁烷是一种化学性质稳定且环保的氟碳类气体,在集成电路制造领域具有广泛应用。对八氟环丁烷的物化性质、制备方法及纯化方法进行了详细说明,介绍了高纯八氟环丁烷在集成电路制造领域的前瞻应用。

High-purity octafluorocyclobutane is a chemically stable and environmentally friendly fluorocarbon gas,which has a wide range of applications in the field of integrated circuit manufacturing.The physical and chemical properties,preparation methods and purification methods of octafluorocyclobutane are described in detail,and the prospective application of high-purity octafluorocyclobutane in the field of integrated circuit manufacturing is introduced.