国内CFD仿真技术在电子厂房洁净室的应用研究现状及趋势分析

Application Research Status and Development Trend of Domestic CFD Simulation Technology in Electronic Factory Cleanroom

通过对近年来国内CFD仿真技术在电子工厂洁净室应用的深入分析,从洁净室气流组织、大型洁净室模拟等效及简化方法、洁净室污染物扩散研究等几个方面,总结了目前CFD仿真技术在电子工厂洁净室应用研究现状。结合目前应用研究的不足,指出了CFD仿真技术在国内电子工厂洁净室的发展趋势。

Through in-depth analysis of the application of domestic CFD simulation technology in the electronic factory cleanroom in recent years, summarizes the current application research status of CFD simulation technology in the electronic factory cleanroom from several aspects: cleanroom air distribution, large cleanroom simulation equivalent and simplified method, pollutant diffusion research. Combined with the current application research deficiencies, pointed out the future development trend of CFD simulation technology in the domestic electronic factory cleanroom.