摘要
采用聚甲基丙烯酸甲脂(PMMA)作为粘结剂,流延成型制备钙铝硼硅(CABS)系微晶玻璃生料带,研究了PMMA对CABS生料带体积密度、微观结构及烧结性能等的影响。实验结果表明,以乙醇和丁酮(质量比为3∶7)作为混合溶剂体系,采用PMMA作粘结剂比使用聚乙烯醇缩丁醛(PVB)成型效果好,PMMA在400℃以前已完全排出,对试样烧结性能影响小;适当增加PMMA质量分数有利于增大生料带体积密度,但不利于提高烧结性能和介电性能;添加质量分数6%PMMA的生料带体积密度为2.07 g/cm^(3),达到了理论体积密度的79%;生料带的烧成试样体积密度最大,为3.06 g/cm^(3),10 MHz下介电常数为8.19,介电损耗为2.4×10^(-3)~2.5×10^(-3)。
The CaO-Al_(2)O_(3)-B_(2)O_(3)-SiO_(2)(CABS)glass-ceramic green tape was prepared with polymethyl methacrylate(PMMA)as binder by tape casting.The effects of PMMA on the green tape bulk density,microstructure,sintering property of CABS were studied.The experimental results show that using ethanol and butanone(mass ratio is 3∶7)as mixed solvent system,the molding effect with PMMA as binder is better than that of with polyvinyl butyral(PVB)as binder.PMMA hasa been completely discharged before 400℃,which has a little effect on the sintering property of samples.Adding moderate PMMA mass fraction is conducive to increase the bulk density of the green tape,but is not conducive to improve the sintering and dielectric properties.The bulk density of the green tape with 6% mass fraction PMMA is 2.07 g/cm^(3),reaching 79% of theoretical bulk density.The bulk density of sintered sample for the green tape is the largest,which is 3.06 g/cm^(3),the dielectric constant is 8.19 and the dielectric loss is 2.4×10^(-3)-2.5×10^(-3) at 10 MHz.
作者
韦鹏飞
Wei Pengfei(School of Material Engineering,Jinling Institute of Technology,Nanjing 211169,China)
出处
《微纳电子技术》
CAS
北大核心
2022年第6期600-605,共6页
Micronanoelectronic Technology
基金
国家重点研发计划资助项目(2018YFF0216004)。
