调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响

Effect of Modulation Structure on Properties of Cr-CrN-Cr-CrAlN Multilayer Films

为提高钛合金的服役性能,采用真空阴极电弧离子镀技术,在TC4钛合金上制备不同R_(Cr-CrN):R_(Cr-CrAlN)调制比的多层膜。使用扫描电镜(SEM)、X射线衍射仪(XRD)、显微硬度计、划痕仪、应力测试仪和砂粒冲蚀试验仪检测并分析了多层膜的截面形貌、结构、厚度、硬度、结合力、残余应力和抗砂粒冲蚀性能等。重点研究了R_(Cr-CrN):R_(Cr-CrAlN)调制比对多层膜性能的影响。结果表明:所制备的多层膜厚度均在7~8μm,过渡层约1.5μm厚,单一周期厚度在150~200nm;膜层均呈现(200)择优生长面心立方结构;随着Cr-CrAlN层占比的增加,膜层的硬度、残余应力和膜基结合力均相应地上升;在90°攻角下不同调制比的多层膜未完全破损前,其抗砂粒冲蚀能力是TC4基材的3倍以上,而在30°攻角下多层膜的抗砂粒冲蚀能力则约为TC4基材的8倍;R_(Cr-CrN):R_(Cr-CrAlN)调制比为1∶2时所制备的多层膜具有最佳的综合性能。

In order to improve the service performance of titanium alloy,multilayer films with different R_(Cr-CrN):R_(Cr-CrAlN) modulation ratio were prepared on TC4 titanium alloy by vacuum cathodic arc ion plating.Scanning electron microscope(SEM),X-ray diffraction(XRD),microhardness tester,scratch tester,stress tester and sand erosion tester were used to detect and analyze the cross-section morphology,structure,thickness,hardness,adhesion,residual stress and sand erosion resistance of the multilayer films.The results show that the thickness of multilayer films is 7-8μm,the transition layer is about 1.5μm,and the thickness of single cycle is 150-200nm.All the multilayer films exhibit(200)preferred growth face centered cubic structure.With the increase of the proportion of Cr-CrAlN layer,the hardness,residual stress and adhesion of the film increase accordingly.The sand erosion resistance of multilayer films with different modulation ratios at 90°angle of attack is more than 3 times that of TC4 substrate before they are completely damaged,and at 30°angle of attack,the sand erosion resistance of multilayer films is about 8 times that of TC4 substrate.When the modulation ratio of R_(Cr-CrN):R_(Cr-CrAlN)is 1∶2,the multilayer films have the best comprehensive properties.