摘要
介绍了喷雾腐蚀机的主要结构和设计优点,简述了SiC功率器件Ti/Al湿法腐蚀工艺;并就生产过程中出现的腐蚀液温度控制、液位传感器、图像识别对中等方面存在的不足做了相应改进。提高了工艺稳定性和生产效率。
The main structure and advantages of spray etching machine are introduced.The Ti/Al wet etching process of Si C power device is briefly described.During the production process,the shortcomings of the spray etching machine in the corrosion temperature control,the liquid level sensor and the vision align were found.The process stability and production efficiency were improved by the corresponding improvements.
作者
徐俊
孙运玺
申强
XU Jun;SUN Yunxi;SHEN Qiang(The 55^(th) Research Institute of CETC,Nanjing 210016,China)
出处
《电子工业专用设备》
2022年第1期4-7,24,共5页
Equipment for Electronic Products Manufacturing
