In_(2)O_(3)/TiO_(2)室温氢气传感器及其优异的氢敏性能

Research of In_(2)O_(3)/TiO_(2) Room Temperature Hydrogen Sensors and Its Excellent Hydrogen Sensitivity

为改善纳米TiO_(2)传感器在室温下对H_(2)虽有快速响应但恢复过慢的问题,引入商业纳米In_(2)O_(3)对其进行改性。分别采用压片法和阳极氧化-沉积法制备了In_(2)O_(3)/TiO_(2)纳米复合压片薄膜和In_(2)O_(3)/TiO_(2)纳米管阵列,并将其应用于氢气传感器,研究了其室温氢敏性能。采用扫描电镜、X射线衍射、比表面积测试等方法对样品进行了表征,并研究了不同电极(Ag、Pt、Pd)、不同热处理温度及不同质量分数的In_(2)O_(3)对复合传感器室温氢敏性能的影响。结果表明,与纯TiO_(2)传感器相比,复合传感器扩大了氢气的检测范围,室温下可检测到体积分数1×10^(-6)~1×10^(-3)的氢气,且恢复时间大大缩短。其中,以Pt为电极,经600℃退火的质量分数为20%的In_(2)O_(3)/TiO_(2)复合传感器表现出最优的氢敏性能,在室温下对体积分数1×10^(-6)H_(2)的响应时间为7 s,恢复时间为32 s。

In order to solve the problem that the nano-TiO_(2) sensor had a fast response to H_(2),but the recovery was too slow at room temperature,commercial nano-In_(2)O_(3) was introduced to modify it.In_(2)O_(3)/TiO_(2) nanocomposite pressed films and In_(2)O_(3)/TiO_(2) nanotube arrays were prepared by pressing method and anodic oxidation-deposition method,respectively.They were applied to hydrogen sensors,and their hydrogen sensitivity were studied at room temperature.The samples were characterized by scanning electron microscopy,X-ray diffraction and specific surface area measurement.And the effects of different electrodes(Ag,Pt,Pd),different heat treatment temperatures and different In_(2)O_(3)/TiO_(2) mass fractions on the hydrogen sensitivity of the sensors at room temperature were studied.It was found that compared with the pure TiO_(2) sensor,the composite sensor expanded the detection range of hydrogen,and could detect 1×10^(-6)-1×10^(-3) hydrogen at room temperature,and the recovery time was greatly shortened.Among them,the In_(2)O_(3)/TiO_(2) composite sensor with a mass fraction of 20%and annealed at 600℃with Pt as the electrode exhibited the best hydrogen sensitivity.At room temperature,the response time to 1×10^(-6) H_(2) was 7 s,and the recovery time is 32 s.