精密对称驱动二级微动放大系统设计及性能

Design and Performance of Precision Symmetric Two-stage Micro-drive Amplification System

为获得具有较高运动精度、无寄生运动、放大比较大且可调的微动平台,基于直圆型柔性铰链的导向、传动原理及机构杠杆原理,设计出一种对称驱动且放大比可调的二级微动放大机构(设计放大比为1∶5),并提出压电陶瓷致动器驱动微动放大机构的精密二级微动放大系统设计方案;分析微动机构驱动性能的导向原理及附加力平衡原理,并对微动二级放大机构的放大比进行理论计算;采用试验法分析系统微驱动器的驱动性能,并解析出其驱动方程;利用有限元法分析系统的强度、模态及运动性能。分析结果表明:系统的强度及模态性能符合要求,具有较高的运动精度(在运动行程内,理论计算与有限元分析最大绝对误差为6.27μm、相对误差为8.36%);所设计的精密对称驱动二级微动放大系统具有运动精度高、安全性强、放大比大且可调等优势。

In order to obtain a fretting platform with high motion precision,no parasitic motion,large amplification ratio and adjustable,based on the guiding principle,driving principle and mechanism lever principle of straight round flexure hinge,a two-stage amplification mechanism with symmetric driving and adjustable amplification ratio(design amplification ratio is 1∶5)is designed.The design scheme of precision two-stage micro-drive amplification system driven by piezoelectric actuator is proposed.The guiding principle and additional force balance principle of the driving performance of the micro mechanism were analyzed,and the two-stage amplification ratio of the two-stage micro-drive amplification mechanism was calculated theoretically.The driving performance of the system micro actuator is analyzed by experimental method,and its driving equation is analyzed.The strength,modal and motion performance of the system are analyzed by finite element method.The analysis results show that the strength and modal performance of the system meet the requirements,and the system has high motion precision(The maximum absolute error and relative error are 6.27μm and 8.36%respectively in the motion stroke).The two-stage micro-drive amplification system with precision symmetric driving designed in this paper has the advantages of high motion precision,excellent safety performance,large amplification ratio and adjustable.