片上磁性薄膜电感设计与仿真

Design and simulation of magnetic thin film on-chip inductor

无源电感广泛应用在射频电路中,用于实现调谐、匹配、滤波等功能。针对片上空心平面螺旋电感的电感值和品质因数低的问题,设计了不同的磁通孔结构,并研究其对电感性能的影响,其中手指型磁通孔结构可以更有效降低涡流损耗。利用HFSS软件比较分析了两种优化后的磁通孔结构对固定线圈平面螺旋电感以及渐变型线圈平面螺旋电感的电感值以及品质因数等的影响。结果表明,顶部和底部磁膜不覆盖磁通孔的结构可以大幅度提高电感值和品质因数,且对渐变型平面螺旋电感的提高作用更为明显。该研究为后续磁膜微电感的设计优化提供了很好的借鉴经验。

Passive inductor is widely used in the field of radio frequency integrated circuit,which can achieve a variety of functions,such as circuit tuning,inpedance matching and signal filtering. Integrating magnetic thin film into air-core planar inductor is a major approach to improve the performance. Based on the closed magnetic film structure,different magnetic via structures were designed. The finger-type magnetic via structure is more effective to reduce the eddy current loss. The HFSS software was adopted to investigate the effect of two optimized magnetic via structure on fixed coil spiral inductor and gradually changed coil spiral inductor. The results indicate that the magnetic via structure without any plain film covered can greatly improve the inductance and quality factor. Moreover,this magnetic via structure is more helpful to gradually changed coil inductor than the fixed coil inductor. The investigations are helpful to optimize the microinductor’s performance.