基于周期性换向冲液的掩膜电解加工技术

Through-mask electrochemical machining technology of periodic reversing electrolyte flow

掩膜电解加工技术是一种用于阵列结构加工的高效电化学加工技术,被广泛应用于各类难加工材料的阵列群孔、群坑或群槽的加工制造。目前,掩膜电解加工中多采用侧面单向供给电解液的方式进行加工,该冲液方式简单易行,但由于加工区迎水面和背水面的流场差异,造成群孔结构的成形精度较差。为此,提出了周期性换向冲液技术,以改善加工区流场分布,进而提升群孔结构的成形精度。通过数值模拟仿真和实验研究,明确了最佳的换向冲液频率,研究结果表明换向冲液技术可以有效提升孔的成形精度。最终,采用周期性换向冲液技术完成了阵列群孔结构的加工,相较于单向冲液,孔的侧壁与轴线夹角差异率下降至1%以内,获得了较高的成形精度。

Through-mask electrochemical machining technology is a high-efficiency electrochemical machining technology for array structure processing,which is widely used in the processing and manufacturing of array group holes,group pits or group grooves of various difficult-to-process materials.At present,through-mask electrochemical machining mostly adopts the method of unidirectionally supplying electrolyte from the side.Although the flushing method is simple and easy to implement,due to the difference in the flow field between the front and back water surfaces of the processing area,the formation accuracy of the group hole structure is poor.For this reason,this paper proposes a periodic reversing fluid flushing technology to improve the flow field distribution in the processing area,thereby enhancing the forming accuracy of the group hole structure.Through numerical simulation and experimental analysis,the best reversing flushing frequency is determined,which proves that the reversing flushing technology can effectively improve the quality of group hole processing.Finally,an array group hole structure is processed by periodic reversing flushing technology.Compared with unidirectional flushing,the difference rate of the angle between the side wall and the axis of the hole is reduced to less than 1%,and a higher forming accuracy is obtained.