半球谐振子外球面加工原理误差分析及实验研究

External sphere grinding principle error analysis and experimental study of hemispherical resonator

通过对“范成法”加工半球谐振子外球面的机理分析,推导出外球面曲率半径的计算公式,分析出影响谐振子外球面形状误差的主要因素为砂轮的形状误差、机床的轴系定位偏差和机床旋转轴的跳动。砂轮形状误差包括砂轮中径误差和砂轮刃口半径误差,机床轴系定位偏差包括X、Y和B轴定位偏差,机床旋转轴跳动包括径向跳动和轴向跳动。通过优化外球面加工工艺参数,加工得到的谐振子外球面圆度小于0.25μm,同心度小于0.4μm,表面粗糙度小于0.02μm,谐振子品质因数大于2.6×10^(7)。

The principle of external sphere grinding of hemispherical Resonator based on generation method is discussed.The theoretical calculation model of curvature radius was established.The dominant errors affecting the machining precision of external sphere are shape error of diamond tool,positioning accuracy of CNC machine axis and runout of CNC machine shaft.The shape error of diamond tool includes the diameter error of diamond tool and radius error of diamond tool edge.The positioning accuracy of CNC machine is determined by the positioning precision of X-axis,Y-axis and B-axis.The runout of CNC machine shaft includes axial and radial runout errors.After optimizing the machining process parameters,the roundness of the hemispherical resonator is less than 0.25μm,the concentricity of the hemispherical resonator is less than 0.4μm,the surface roughness is less than 0.02μm and the Q value is greater than 2.6×10^(7).