基于ELCR的双模微波湿度传感器

Dual mode microwave humidity sensor based on ELCR

基于电耦合电感电容谐振器(ELCR)设计并制造了一种新型聚酰亚胺微波湿度传感器(PMHS),PMHS的双谐振点位置与幅度可按检测需求灵活调节。实验结果显示:在10%~90%RH的湿度范围内,PMHS在1.2 GHz处谐振点偏移量和2.085 GHz处反射系数增量与湿度变化成线性关系,双模线性度R^(2)分别为0.9854和0.9987,两者的检测灵敏度分别为83.8 kHz/%RH和0.117 dB/%RH。该研究表明:多谐振微波传感器可作为一种新方案实现宽范围、高线性度、高灵敏度的湿度检测。

A novel polyimide microwave humidity sensor(PMHS)is designed and manufactured based on electrically-coupled LC resonator(ELCR).The position and amplitude of the dual resonance points of PMHS can be flexibly adjusted according to the detection requirements.Experimental results show that in the humidity range of 10%~90%RH,the offset of resonance point at 1.2 GHz and the increase of reflection coefficient at 2.085 GHz are in linear relationship with the humidity change.The dual-mode linearity R^(2) is 0.9854 and 0.9987,respectively,and the detection sensitivity is 83.8 kHz/%RH and 0.117 dB/%RH,respectively.The research demonstrates that the multi-resonance microwave sensor can be a promising solution to the wide-range,high linearity,and high sensitivity humidity detection.