基于亚波长光栅结构的折射率传感研究进展

Research Progresses of Refractive Index Sensing Based on Subwavelength Grating Structures

新一代片上传感系统提出了微型化、集成化、低成本等发展需求,硅基集成波导器件适应其发展趋势,其中亚波长光栅结构因独特的模场分布特性在折射率传感领域备受青睐。文章首先对亚波长光栅波导的工作原理进行了介绍,阐述其在折射率传感领域的优势,然后按器件结构分类梳理了亚波长光栅结构折射率传感的最新研究进展,并分析和总结了不同器件结构的优缺点,最后展望了基于亚波长光栅结构的折射率传感未来的发展方向。

New generation on-chip sensing system puts forward the requirements of miniaturization,integration,low cost,etc.Silicon-based integrated waveguide devices adapt to its development trend,and the sub-wavelength grating structure is favored in the field of refractive index sensing because of its unique mode distribution characteristics.In this paper,first,the operating principles of the sub-wavelength grating waveguide are introduced,focusing on its advantages in the field of refractive index sensing.Then,the latest research progress of refractive index sensing based on subwavelength grating structures are sorted out according to the classification of device structures,and their advantages and disadvantages are analyzed and summarized simultaneously.Finally,the future development of refractive index sensing based on sub-wavelength grating structures is discussed.