集成化高速APD的研究进展

Research Progresses of Integrated High-speed APD

理论分析了降低雪崩光电二极管(APD)噪声、提高其增益及带宽的一般方法。面向APD综合响应度与带宽之间存在的固有矛盾问题,提出了采用三维纳米化技术降低APD的噪声,以及采用集成光学技术提高APD的响应度的解决方案。在此基础上,从表面等离基元聚光结构与垂直光入射型APD的混合集成、超透镜与垂直光入射型APD的混合集成,以及阵列波导光栅(AWG)与光侧入射倏逝波耦合波导(EC)APD的单片集成等三个方面,综述了集成化高速APD的研究进展,对该领域的发展趋势进行了展望。

The general methods for reducing the noise of avalanche photodiode(APD)and improving its gain and bandwidth were analyzed.Aiming at the inherent contradict ion between the responsivity and bandwidth,the solutions were proposed in this paper,such as using three-dimensional nano-technology to reduce the noise of APD and using integrated optical technology to improve the responsivity.The research progresses of integrated high-speed APD were summarized,including the following three aspects:hybrid integration of surface plasmon focusing structure with APD of vertical light incidence,hybrid integration of super lens with APD of vertical light incidence,and monolithic integration of arrayed waveguide grating(AWG)and evanescent wave coupling waveguide APD of side optical incident.The development trends were prospected as well.