FIB-SEM双束系统在PCB及IC载板缺陷检测中的应用

Application of FIB-SEM Dual Beam System in Defect Detection of PCB and IC-substrate

FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷检测中的常见应用,如盲孔孔底分析、杂物失效分析和晶体结构分析。

FIB-SEM dual beam system is a system integrating focused ion beam and scanning electron microscope.Its biggest advantage is that it can realize the function of real-time observation with electron beam while ion beam cutting or micromachining.The common application of FIB-SEM in defect detection of PCB and IC-substrate is mainly introduced,such as blind hole bottom analysis,debris failure analysis,crystal structure analysis.