一种压阻式压力传感器温度特性研究

Research on Temperature Characteristics of a Piezoresistive Pressure Sensor

压阻式压力传感器的输出会明显受到温度变化的影响。本文研究了在温升和温降过程中,不同温度条件下传感器的零点漂移、输出误差,以及满量程范围的输出信号的变化,进一步提出了利用多项式-最小二乘法拟合试验数据进行温度补偿函数的探索,对这类传感器在宽温区条件下的温度补偿设计提供了一定的数据支撑和参考。

The output of a piezoresistive pressure sensor is significantly affected by temperature changes.In this paper,the zero drift of the sensor,the output error and the change of the output signal in the full scale range under different temperature conditions are studied in the process of temperature rise and temperature drop.Further,this paper proposes to use the polynomial-least-squares method to fit the experimental data to explore the temperature compensation function,which provides data support and reference for the temperature compensation design of this type of sensor under the condition of wide temperature range.