L~Ka波段MEMS单刀七掷开关的设计与研究

Design and research of L~Ka band MEMS SP7T switch

针对目前MEMS单刀七掷开关体积大、插入损耗及隔离度较差的问题,设计了一种基于“米”字型功分器的单刀七掷MEMS开关,通过HFSS软件对射频MEMS开关单元和“米”字型功分器进行设计,对开关的S参数、驻波比进行了仿真研究,并采用COMSOL软件对射频MEMS开关单元进行机械性能分析。结果表明,在1~40 GHz频段内,单刀七掷MEMS开关各个端口的插入损耗≤0.45 dB@40 GHz,隔离度≥29.5 dB@40 GHz,驻波比≤1.45,且体积仅有0.65 mm×0.5 mm×0.5 mm。此设计可与滤波器、衰减电阻、天线等集成,应用于多通道可调谐MEMS器件中,在卫星通信、雷达、和微波测试领域中具有一定的应用价值。

Aiming at the problems of large volume, poor insertion loss and isolation of MEMS SP7 T switch at present, a kind of SP7 T MEMS switch based on "meter" power divider is designed. RF MEMS switch unit and "meter" power divider are designed by HFSS software, and the S parameter and standing wave ratio of the switch are simulated and studied. The mechanical performance of RF MEMS switch unit is analyzed by COMSOL software. The results show that the insertion loss of each port of SP7 T MEMS switch is better than 0.45 dB@40 GHz, the isolation is better than 29.5 dB@40 GHz, the standing wave ratio is less than 1.45, and the volume is only 0.65 mm×0.5 mm×0.5 mm. This design can be integrated with filters, attenuation resistors, antennas, etc. It can be used in multi-channel tunable MEMS devices, and has certain application value in satellite communication, radar and microwave test systems.