Spatial resolution and image processing for pinhole camera-based X-ray fluorescence imaging: a simulation study

Spatial resolution and image-processing methods for full-field X-ray fluorescence(FF-XRF)imaging using X-ray pinhole cameras were studied using Geant4simulations with different geometries and algorithms for image reconstruction.The main objectives were:(1)calculating the quantum efficiency curves of specific cameras,(2)studying the relationships between the spatial resolution and the pinhole diameter,magnification,and camera binning value,and(3)comparing image-processing methods for pinhole camera systems.Several results were obtained using a point and plane source as the X-ray fluorescence emitter and an array of 100×100 silicon pixel detectors as the X-ray camera.The quantum efficiency of a back-illuminated deep depletion(BI-DD)structure was above 30%for the XRF energies in the 0.8–9 keV range,with the maximum of 93.7%at 4 keV.The best spatial resolution of the pinhole camera was 24.7μm and 31.3 lp/mm when measured using the profile function of the point source,with the diameter of 20μm,magnification of 3.16,and camera bin of 1.A blind deconvolution algorithm with Gaussian filtering performed better than the Wiener filter and Richardson iterative methods on FF-XRF images,with the signal-to-noise ratio of 7.81 dB and improved signalto-noise ratio of 7.24 dB at the diameter of 120μm,magnification of 1.0,and camera bin of 1.