18 MΩ·cm超纯水工艺研究

Study on 18 MΩ·cm Ultra-Pure Water Process

对超纯水的水质要求和生产工艺进行阐述,分别介绍了MFEDI生产工艺、水质净化处理以及电化去离子系统在超纯水生产中的应用,分析了生产超纯水的民生价值,旨在推广联合产水工艺在超纯水生产中的应用,提高超纯水的生产质量。

The paper describes the water quality requirements and production process of ultrapure water, and introduces the application of MFEDI production process, water purification treatment and electrochemical deionization system in ultrapure water production, analyzes the livelihood value of producing ultra-pure water, aiming at popularizing the application of combined water production process in ultra-pure water production and improving the production quality of ultra-pure water.