基于改进YOLOV4的陶瓷基板瑕疵检测

Defect detection in ceramic substrate based on improved YOLOV4

陶瓷基板是半导体元器件的重要基础材料,其瑕疵检测对保证产品质量具有重要的意义。提出了一种基于改进YOLOV4网络的陶瓷基板瑕疵自动检测方法。针对陶瓷基板瑕疵尺寸较小、颜色形状多变以及不同类瑕疵间尺寸变化较大导致的瑕疵检测困难问题,改进的YOLOV4网络通过借鉴Complete Intersection over Union(CIoU)思想优化初始先验框设计,引入基于梯度协调机制的置信度损失函数和十字交叉注意力网络来改善缺陷检测能力。实验结果表明,基于改进YOLOV4的陶瓷基板瑕疵检测方法对于陶瓷基板污染、异物、多金、缺瓷以及损伤这5类瑕疵检测的平均准确性达到98.3%,可满足工业现场对陶瓷基板瑕疵的检测精度要求。

A ceramic substrate is an important basic material for semiconductor components.Detecting de⁃fects in it is of great significance for ensuring high product quality.An automatic defect detection method for a ceramic substrate based on the improved YOLOV4 network was proposed in this paper.To ease the difficulty associated with defect detection caused by small defect size,varying color and shape,and large size variation between different kinds of defects in a ceramic substrate,the improved YOLOV4 model opti⁃mized the design of the initial prior box by referring to the Complete Intersection over Union(CIoU)idea.The model then introduced the Confidence Loss function based on the Gradient Harmonizing Mechanism(GHM)and CRISS-Cross Attention Net(CCNet)to improve the defect detection ability.The experi⁃mental results show that the average accuracy of the detection method based on the improved YOLOV4 model for ceramic substrate defects,including stain,foreign matter,gold edge bulge,ceramic gap and damage,can reach 98.3%.This accuracy meets the industry requirements for the detection accuracy of ceramic substrate defects.