背钝化自动上下料机产能提升方法研究

Research of Methods to Improve the Production Capacity of Back Passivation AutomaticLoader and Unloader Machine

通过梳理背钝化自动上下料机中硅片、花篮、托盘的传输流程,分析制约设备产能的因素,提出通过优化硅片搬送机构,改进托盘传送机构,重新设计硅片上料定位机构,提升硅片下料传输速度,同时提出优化设备各循环的动作流程等合理的改进方案,在保证设备稳定运行的前提下,提升设备单机产能。

By combing the transfer flow of wafers,baskets and trays in the back passivation automatic loading and unloading machine,the factors that limit the capacity of the equipment are analyzed.By optimizing the wafer transfer mechanism,improving the tray transfer mechanism,redesigning the wafer loading and positioning mechanism,improving the wafer loading and unloading transfer speed,and optimizing the action flow of each cycle of the equipment,reasonable improvement solutions are proposed to improve the capacity of the equipment on a single machine while ensuring the stable operation of the equipment.