基于多波长光学系统结构的透射波前检测

Transmitted wavefront testing based on multi-wavelength optical system structure

基于多波长波前检测技术的实际需要,设计了多波长激光干涉仪光学结构。结构基于菲索干涉原理,使用分光棱镜集成5个波长的激光光源。通过笼式系统减小了光学结构各部分的同轴误差,采用消色差镜头作为干涉系统的准直系统和成像系统,缩短了调整准直系统行程的同时,也减小了系统内部光学系统的色差。使用该光学结构对光学系统进行测量,采用转换多项式法计算的Zernike系数-波长曲线符合预测结果。多波长激光干涉仪光学结构提高了多波长透射波前的检测效率,有利于多波长透射波前检测技术的工程化和推广,并为新仪器的开发提供了借鉴。

Based on the practical needs of multi-wavelength wave front detection testing technology,an optical structure of multi-wavelength laser interferometer was designed.Based on the Fizeau interference principle,the structure uses a splitter prism to integrate 5 wavelengths of laser light sources.The coaxial error of each part of the optical structure is reduced by the cage system,and the achromatic lens is used as the collimating system and imaging system of the interference system,which can shorten the travel of the collimating system and reduce the color difference of the optical system inside the system.The Zernike coefficient and wavelength curves calculated by the conversion polynomial method are in good agreement with the predicted results.The optical structure of multi-wavelength laser interferometer improves the testing efficiency of multi-wavelength transmitted wave front,which is conducive to the engineering and popularization of multi-wavelength transmitted wavefront testing technology,and provides a reference for the development of new instruments.