Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

With the purpose of designing the extreme ultraviolet polarizer with many objectives,a combined application of multiobjective genetic algorithms is theoretically proposed.Owing to the multi-objective genetic algorithm,the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space,and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction.Compared with the conventional method of multilayer design,our method has a higher probability of achieving the optimal multilayer design.Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space,and our results demonstrate a potential application of our method in the designs of optical thin films.