碳黑基高灵敏度弹性应变传感器的制备与性能研究

Preparation and Performance Research of Highly Sensitive and Stretchable Carbon-black-based Strain Sensors

提出一种使用碳黑(carbon black,CB)作为敏感材料,硅橡胶(silicon rubber,SR)作为弹性基底,并使用MEMS工艺制作的柔性电极制备而成的CB/SR弹性应变传感器。主要介绍了CB/SR弹性应变传感器的制备工艺,并标定了应变传感器和对传感器进行了循环拉伸耐久度测试,最终使用该传感器测试了人体运动及生理信号。测试结果表明该传感器最大拉伸范围为100%,应变灵敏度系数(gauge factor,GF)达到了143.14,响应时间仅为73 ms,可承受3000次循环拉伸,能够用于监测关节运动和脉搏等人体活动,在可穿戴设备、康复设备等领域具有广阔的应用前景。

A CB/SR stretchable strain sensor using carbon black(CB)as sensitive material,silicon rubber(SR)as elastic substrate and flexible electrode fabricated by MEMS process was proposed.This paper introduced the preparation process of the CB/SR-based stretchable strain sensor,and the strain sensor was calibrated and was tested for cyclic tensile endurance.Finally,the sensor was used to measure human movement and physiological signals.Test results show that the maximum stretch range of the sensor is 100%,gauge factor(GF)reaches 143.14,and the response time is only 73 ms,which can withstand 3000 cycles of tensile,the sensor can detect human movement such as joint movement and sphygmus wave,showing promising applications in wearable device and rehabilitation equipment.